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1. Modell 412
Mask Aligner, Photolithography, Laser Ablation
Tamarack's large beam projection laser ablation technology dramatically reduces ablation time while also increasing resolution capability and pattern placement accuracy.
In addition, the process provides good material removal selectivity and generates little or no heat to the surrounding areas. High power excimer lasers and projection lenses provide the ability to generate holes as small as 1 micron diameter. A mask similar to a semiconductor reticle determines the pattern to be produced. It allows generation of complex shapes, and provides the ability to change patterns by simply replacing the mask.