Click image to enlarge
SOM 1XXX Series
Semiconductor Failure Analysis
SOM 1XXX is an integrated PC-based Scanning Optical Microscope system designed for maximum ease of use and flexibility. The system is optimized for maximum sensitivity and resolution of laser induced phenomena with high laser power. Currently, the system is designed for OBIC, SCOBIC, LIVA, TIVA and OBIRCH measurements and is upgradeable for future innovative techniques. SOM 1XXX can be customized to meet special requirements and applications and can be configured with a 1064nm and/or a 1340nm laser. Therefore it also has backside Failure Analysis capabilities.