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NADAtech s3x
Wafer Sorter, EFEM
- three station 150mm/200mm SMIF carrier compatible
- industry standard ISEL OEM robotics
- small 200mm three stage footprint
- sub class 1 particle performance
- automation capable with SECII/GEM/HSMS
- GUI based RBuilder™ for easy recipe development
- UPS power backup + vacuum resevoir