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NADAtech s2x
Wafer Sorter, EFEM
- two station 150mm/200mm SMIF carrier compatible
- industry standard Equipe™ OEM robotics
- smallest 200mm two stage footprint
- sub class 1 particle performance
- automation capable with SECII/GEM/HSMS
- GUI based RBuilder™ for easy recipe development
- UPS power backup + vacuum resevoir