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NADAtech n4x
Wafer Sorter, EFEM
- four station 1XXmm/200mm open cassette compatible
- industry standard Equipe™ OEM robotics
- smallest 200mm four stage footprint available
- NEW thrubeam cassette mapping
- automation capable with SECSII/GEM/HSMS
- GUI based RBuilder™ for easy recipe development
- UPS power backup + vacuum resevoir