NPT-1, NPT-2 and NPT-3
Particle Deposition Systems, Wafer Standards

The NPT systems provide highly accurate PSL Wafer Size Standards from 20nm to 1um with very narrow distribution widths below 80nm. Otherwise they incorporate features similar to the 2300XP. Therefore, they are ideal for the calibration of the new generation of metrology tools such as SP2-TBI systems from KLA Tencor and similar tools operating with particle sizes around 35nm.