CENTAR Frontier
Polishing for Sample Preparation
The Centar is a computer controlled single platform sample preparation system for automated polishing, including cross section and parallel polishing of ICs and disk heads for SEM, TEM, SCM, and PEM, at wafer, die and package levels. An integrated microscope coupled with a CCD camera and image magnification of up to 9000X in tandem with the proprietary SMPT* (Sub Micron Polishing Technology) enable easy target positioning, definition and process monitoring. The PC based system enables the use of existing process recipes, develop new specific recipes, save images and data, and share all information with other departments or sites.
Additional features:
- Proprietary image processing,
- Automated target acquisition,
- Edge detection, coupled with Sagittas online PolishEye* module
- EAC* (Exact Angle Control - +/-0.003deg)
- Accuracy down to +/-0.1um
- High throughput
- Unique bevel polishing