http://www.CyberopticsSemi.com
Levelling/ALS2V - Teaching/ATS - Gapping/AGS and Vibration/AVS Sensors for wireless measurements - Wafer Mapper
Click image to enlarge
EX-QS
WaferSense for wireless measuring; Wafer Mapper
Wafer Mapping Sensors: The EX-QS is an EX-Q wafer mapping sensor repackaged in a smaller case where a smaller sensor footprint is desired. Wafer Mapping Sensors feature reflective laser technology with 1.5" to 2.2" standoff distances. They enable quick and reliable detection of semiconductor wafers and slotting errors. The EX-Q easily mounts on robots and plungers.