http://www.CyberopticsSemi.com
Levelling/ALS2V - Teaching/ATS - Gapping/AGS and Vibration/AVS Sensors for wireless measurements - Wafer Mapper
Click image to enlarge
EX-Q
WaferSense for wireless measuring; Wafer Mapper
Wafer Mapping Sensors: Wafer Mapping Sensors featuring reflective laser technology with 1.5" to 4" standoff distances. Enables quick and reliable detection of semiconductor wafers and slotting errors. The EX-Q easily mounts on robots and plunger.