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Levelling/ALS2V - Teaching/ATS - Gapping/AGS and Vibration/AVS Sensors for wireless measurements - Wafer Mapper
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AVS200 and AVS300
WaferSense for wireless measuring; Wafer Mapper
WaferSense™ AVS can be moved through your semiconductor process equipment and automation material handling systems to monitor three-axis accelerations and vibrations. Its wafer-like shape is compatible with your existing automation and its wireless communication provides real-time data to speed tool setup and maintenance. Vibration data can be recorded so you can compare past to present as well as one tool to another to reduce particles, maintenance time and cycle time.