ATS200 and ATS300
WaferSense for wireless measuring; Wafer Mapper

WaferSense™ ATS measures threedimensional offsets to teach wafer transfer positions. Using machine vision technology it "sees" targets inside semiconductor equipment. Wireless and wafer-like, it is automatically handled to significantly speed equipment setup and maintenance. The teaching wafer is also vacuum compatible so measurements can be taken while the equipment is sealed, saving qualification time and consumables. An intuitive graphical user interface provides digital x, y, and z offsets that eliminate guesswork.

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