AGS 300
WaferSense for wireless measuring; Wafer Mapper

WaferSense™ AGS measures gaps that are critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etch. It uses a apacitive sensing technique (patent pending) that consists of three sensors and responds to the proximity of a conductive electrode, such as a shower head, to return live gap measurements that display on your laptop or PC in numerical and graphical form. Since AGS is wireless and wafer-like, it can be handled automatically to speed equipment setup and maintenance.

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