http://www.CyberopticsSemi.com
Levelling/ALS2V - Teaching/ATS - Gapping/AGS and Vibration/AVS Sensors for wireless measurements - Wafer Mapper
AGS 200
WaferSense for wireless measuring; Wafer Mapper
WaferSense™ AGS200 Auto Gapping System Precision Wireless Gap Measurement WaferSense™ AGS200 measures gaps that are critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etch. It uses a patent pending capacitive sensing technology to measure the distance to a conductive electrode, such as a shower head, to return real time gap measurements that display on your laptop or PC in numerical and graphical form. Since AGS is wireless and wafer-like, it can be handled automatically to speed equipment setup and maintenance.