ATS

 

http://www.atschiller.com

 

Chiller for LAM / AMAT Dry Etch tools and other applications


M-Pak-series

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M-Pak-series
Chiller

Another ATS advancement, the M-PAK series, offers customers a modular multi-channel TCS in chiller, heat exchanger or combination configurations. The M-PAK series and the DEX series both provide easy-to-use PLC control with touch panel displays, and meet all CFC-Free/Kyoto Protocol requirements in a space saving footprint.