ATS

 

http://www.atschiller.com

 

Chiller for LAM / AMAT Dry Etch tools and other applications


DEX-series

 Click image to enlarge

DEX-series
Chiller

Advanced Thermal Sciences Corporation (ATS) brings over twenty five years of commercial aircraft refrigeration engineering leadership to the semiconductor industry. By combining leading edge temperature control and heat transfer technology, an ATS temperature control system (TCS) delivers the highest level of performance and reliability. The products typically deliver over 40,000 hours MTBF. ATS offers a broad application range from -65°C to over +200°C. Plus, ATS has one of the finest global support organizations committed to just chillers and heat exchangers. Our DEX product line (formerly known as T-Cube or Taitec) provides one of the best single channel control for chiller or heat exchanger applications.