Refurbished Matrix 105
Rapid Thermal Processor

Matrix 105 provides high throughput in a single wafer system capable of handling wide variety of substrates, including round, square and ranging from 2" up to 6". By maintaining independent closed-loop system controls, the system optimizes vital device parameters.

Allwin 21 has developed a robot control board fort he Matrix machines to help in the diagnostics of robot problems. There are LEDs that indicate if the board has received commands and the type of command. It also has LEDs that indicate if a robot limit sensor is active, along with "good" voltage level indicators.

Key Features:

Single Wafer, Multi-Step Processing

Typical Applications:

Photoresist Stripping

Controlled REsist Removal