
AccuThermo AW810
Rapid Thermal Processor
AccuThermo AW810 is a desktop rapid thermal processor, rapid thermal annealing system, which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures. These capabilities, combined with the heating chamber's cold-wall design, superior heating uniformity, advanced temperature control technology and AW900 new software, provide significant advantages over conventional furnace processing and conventional RTP systems.
Wafer size: 6" & 8"