AccuThermo AW610
Rapid Thermal Processor

AccuThermo AW610, originally the AG Heatpulse 610, is a desktop rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures. These capabilities combined with the heating chamber's cold-wall design, superior heating uniformity, advanced temperature control technology and AW900 new software, provide significant advantes over conventional furnace processing and conventional RTP systems.

Wafer size: 2", 3", 4", 5", 6"