Refurbished GaSonics Aura 1000
Rapid Thermal Processor

GaSonic Aura 1000 Plasma System is the microprocessor controlled down-stream, or "afterglow" photoresist stripper that will strip the front and backside of a wafer, typically in less than one minute. The unit is fully automated, cassette-to-cassette, and is a single-wafer process design.

Wafer handling problems with Indexer System oft he original GaSonics Aura 1000? Allwin21 has replaced the GaSonics Aura 1000 wafer handling system with the superior 3-axis Equipe ATM Wafer Handling Robot. This gives the GaSonics Aura 1000 a much superior wafer transport system with proven reliability, higher throughput, increased MTBF and lower overall cost. Along with fewer headaches, better peace-of-mind, and longer coffee breaks.

Key Features:

Single-wafer process

3", 4", 5" and 6" wafer capability

Advantages of upgraded system:

The AW Series Software provides the unique upgrade system for GaSonics Aura 1000, GaSonics Aura 3010, GaSonics Aura L3510, GaSonics Aura 2000LL, GaSonics AE 2001.